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                                                                                                                                                                                                                        砷化鎵晶片 GaAs Wafer

                                                                                                                                                                                                                        我們研發并生產的2-6英半導體級以及半絕緣級高純度砷化鎵晶體和晶片被廣泛應用于半導體集成電路以及LED通用照明等領域。

                                                                                                                                                                                                                        Our 2’’ to 6’’ semi-conducting & semi-insulating GaAs crystal & wafer are wildly used in semiconductor integrated circuit application & LED general lighting application.


                                                                                                                                                                                                                        半導體砷化鎵規格 Specifications of semi-conducting GaAs wafer

                                                                                                                                                                                                                        生長方法
                                                                                                                                                                                                                          Growth Method 

                                                                                                                                                                                                                           VGF 

                                                                                                                                                                                                                          摻雜類型
                                                                                                                                                                                                                          Dopant 

                                                                                                                                                                                                                          P型:鋅 
                                                                                                                                                                                                                          p-type: Zn 

                                                                                                                                                                                                                          N型:硅
                                                                                                                                                                                                                          n-type: Si

                                                                                                                                                                                                                          晶片形狀
                                                                                                                                                                                                                          Wafer Shape 

                                                                                                                                                                                                                          圓形(尺寸2、3、4、6英寸)
                                                                                                                                                                                                                          Round (DIA: 2", 3", 4", 6") 

                                                                                                                                                                                                                          晶向 
                                                                                                                                                                                                                          Surface Orientation * 

                                                                                                                                                                                                                          (100)±0.5° 

                                                                                                                                                                                                                          * Other Orientations maybe available upon request 
                                                                                                                                                                                                                            其他晶向要求可根據客戶需求加工 

                                                                                                                                                                                                                        Dopant
                                                                                                                                                                                                                        摻雜

                                                                                                                                                                                                                        硅 (N 型)
                                                                                                                                                                                                                        Si (n-type)

                                                                                                                                                                                                                        鋅 (P 型)
                                                                                                                                                                                                                        Zn (p-type)

                                                                                                                                                                                                                        載流子濃度
                                                                                                                                                                                                                        Carrier Concentration (cm-3)

                                                                                                                                                                                                                        ( 0.8-4) × 1018

                                                                                                                                                                                                                        ( 0.5-5) × 1019

                                                                                                                                                                                                                        遷移率 
                                                                                                                                                                                                                          Mobility (cm2/V.S.)

                                                                                                                                                                                                                        ( 1-2.5) × 103

                                                                                                                                                                                                                        50-120

                                                                                                                                                                                                                          位錯 
                                                                                                                                                                                                                          Etch Pitch Density (cm2) 

                                                                                                                                                                                                                         100-5000

                                                                                                                                                                                                                        3,000-5,000

                                                                                                                                                                                                                        直徑
                                                                                                                                                                                                                        Wafer Diameter (mm)

                                                                                                                                                                                                                        50.8±0.3

                                                                                                                                                                                                                        76.2±0.3

                                                                                                                                                                                                                        100±0.3

                                                                                                                                                                                                                          厚度 
                                                                                                                                                                                                                          Thickness (μm) 

                                                                                                                                                                                                                        350±25

                                                                                                                                                                                                                        625±25

                                                                                                                                                                                                                        625±25

                                                                                                                                                                                                                          TTV [P/P] (μm) 

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                          TTV [P/E] (μm) 

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                          WARP (μm) 

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        OF (mm)

                                                                                                                                                                                                                        17±1

                                                                                                                                                                                                                        22±1

                                                                                                                                                                                                                        32.5±1

                                                                                                                                                                                                                        OF / IF (mm)

                                                                                                                                                                                                                        7±1

                                                                                                                                                                                                                        12±1

                                                                                                                                                                                                                        18±1

                                                                                                                                                                                                                        Polish*

                                                                                                                                                                                                                        E/E,
                                                                                                                                                                                                                        P/E,
                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        E/E,
                                                                                                                                                                                                                        P/E,
                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        E/E,
                                                                                                                                                                                                                        P/E,
                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        *E=Etched, P=Polished(*E=腐蝕, P=拋光)

                                                                                                                                                                                                                          **If needed by customer 
                                                                                                                                                                                                                              根據客戶需要 


                                                                                                                                                                                                                        半絕緣砷化鎵 Specifications of semi-insulating GaAs wafer

                                                                                                                                                                                                                        生長方法

                                                                                                                                                                                                                          Growth Method 

                                                                                                                                                                                                                           VGF 

                                                                                                                                                                                                                          摻雜類型

                                                                                                                                                                                                                          Dopant 

                                                                                                                                                                                                                          SI 型:

                                                                                                                                                                                                                        SI Type:  Carbon 

                                                                                                                                                                                                                          晶片形狀

                                                                                                                                                                                                                          Wafer Shape 

                                                                                                                                                                                                                          圓形(尺寸2、3、4、6英寸)

                                                                                                                                                                                                                          Round (DIA: 2", 3", 4"6") 

                                                                                                                                                                                                                          晶向 

                                                                                                                                                                                                                          Surface Orientation * 

                                                                                                                                                                                                                          (100)±0.5° 

                                                                                                                                                                                                                          * Other Orientations maybe available upon request 

                                                                                                                                                                                                                            其他晶向要求可根據客戶需求加工 

                                                                                                                                                                                                                          電阻率 

                                                                                                                                                                                                                          Resistivity  (Ω.cm) 

                                                                                                                                                                                                                        ≥ 1 × 107

                                                                                                                                                                                                                        ≥ 1 × 108

                                                                                                                                                                                                                        遷移率

                                                                                                                                                                                                                        Mobility (cm2/V.S)

                                                                                                                                                                                                                        ≥ 5,000

                                                                                                                                                                                                                        ≥ 4,000

                                                                                                                                                                                                                          位錯 

                                                                                                                                                                                                                          Etch Pitch Density (cm2

                                                                                                                                                                                                                          1,500-5,000

                                                                                                                                                                                                                        1,500-5,000

                                                                                                                                                                                                                        晶片直徑

                                                                                                                                                                                                                        Wafer Diameter (mm)

                                                                                                                                                                                                                        50.8±0.3

                                                                                                                                                                                                                        76.2±0.3

                                                                                                                                                                                                                        100±0.3

                                                                                                                                                                                                                        150±0.3

                                                                                                                                                                                                                          厚度 

                                                                                                                                                                                                                          Thickness (μm) 

                                                                                                                                                                                                                        350±25 

                                                                                                                                                                                                                        625±25

                                                                                                                                                                                                                        625±25

                                                                                                                                                                                                                        675±25 

                                                                                                                                                                                                                          TTV [P/P] (μm) 

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                        ≤ 4

                                                                                                                                                                                                                          TTV [P/E] (μm) 

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                          WARP (μm) 

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 10

                                                                                                                                                                                                                        ≤ 15

                                                                                                                                                                                                                        OF (mm)

                                                                                                                                                                                                                        17±1

                                                                                                                                                                                                                        22±1

                                                                                                                                                                                                                        32.5±1

                                                                                                                                                                                                                        NOTCH

                                                                                                                                                                                                                        OF / IF (mm)

                                                                                                                                                                                                                        7±1

                                                                                                                                                                                                                        12±1

                                                                                                                                                                                                                        18±1

                                                                                                                                                                                                                        N/A

                                                                                                                                                                                                                        Polish*

                                                                                                                                                                                                                        E/E,

                                                                                                                                                                                                                        P/E,

                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        E/E,

                                                                                                                                                                                                                        P/E,

                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        E/E,

                                                                                                                                                                                                                        P/E,

                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        E/E,

                                                                                                                                                                                                                        P/E,

                                                                                                                                                                                                                        P/P

                                                                                                                                                                                                                        *E=Etched, P=Polished (*E=腐蝕, P=拋光)

                                                                                                                                                                                                                          **If needed by customer 

                                                                                                                                                                                                                              根據客戶需要 


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